摘要 |
PROBLEM TO BE SOLVED: To provide a fine movement mechanism which is resistant against an external impulse and vibration. SOLUTION: The fine movement mechanism is characterized in that a holding mechanism is provided for holding a movable part, the moving part is held so as to apply a preliminary pressure on an elastic body by using a movable part holder and an unnecessary movement of the movable part is prevented. The movable part holder is fixed on the movable part and the positioning structure of the movable part holder of the fixed part, and the displacement of the movable part is prevented. COPYRIGHT: (C)2005,JPO&NCIPI |