发明名称 SUBSTRATE MACHINING METHOD BY SANDBLAST
摘要 PROBLEM TO BE SOLVED: To provide a substrate machining method for preventing a ridge between a substrate surface and a chamfered surface from locally wearing and preventing the chamfered form from varying when a chamfered substrate is to be sandblasted. SOLUTION: In sandblasting the substrate surface, a plate material 2 is placed in contact with or in the proximity with the periphery of the substrate 1 to protrude from the substrate surface toward a blast nozzle, for sandblasting the substrate surface. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004306219(A) 申请公布日期 2004.11.04
申请号 JP20030105030 申请日期 2003.04.09
申请人 SHIN ETSU CHEM CO LTD 发明人 SHIBANO YUKIO;MIHARADA SATORU;WATABE ATSUSHI;UEDA SHUHEI
分类号 G02F1/13;B24C1/00;G02F1/1333;H01L21/027;(IPC1-7):B24C1/00;G02F1/133 主分类号 G02F1/13
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