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发明名称
MICROMACHINED OPTO-THERMAL GAS SENSOR
摘要
申请公布号
EP0993602(B1)
申请公布日期
2004.11.03
申请号
EP19980931592
申请日期
1998.06.26
申请人
HONEYWELL INC.
发明人
WOOD, R., ANDREW
分类号
G01N29/00;G01N21/17;G01N25/48;(IPC1-7):G01N21/17
主分类号
G01N29/00
代理机构
代理人
主权项
地址
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