METHOD FOR FABRICATING OPTICAL INTERFERENCE DISPLAY UNIT HAVING POSTS OF ARMS

摘要

PURPOSE: A method for fabricating an optical interference display unit having posts of arms is provided to enhance the productivity by simplifying a fabrication process. CONSTITUTION: A first electrode(502) is formed on a substrate(501). A sacrificial layer is formed on the first electrode. Two or more openings are formed on the sacrificial layer and the first electrode to define a position of an optical interference display unit. A photosensitive material layer is formed to fill the openings and cover the sacrificial layer. The photosensitive material layer is patterned to form a support in each of the openings and at least one arm on the support, wherein the support and at least one arm(5121,5122) form a post. A second electrode(504) is formed on the sacrificial layer and at least one arm. A thermal process is performed to treat the post. The sacrificial layer is removed therefrom.