| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas blow-out type ladder electrode capable of improving a film forming speed by reducing the spacing between the gas blow-out type ladder electrode and a substrate. <P>SOLUTION: The gas blow-out type ladder electrode 10 is arranged between a heater cover 11 for supporting a substrate K to be treated and a contamination plate 12, supplies gas into a space S enclosed by the heater cover 11 and the contamination plate 12, has a function as an electrode and comprises a gas supply pipe, an upper gas header 10a and lower gas header 10b connected to the gas supply pipe and a plurality of gas pipes 10c connected between the upper gas header 10a and the lower gas header 10b. Gas blow-out holes 10d disposed at the gas pipes 10c in order to blow out the gas into the space S are so punched as to prevent the main stream of gas blown out of the gas blow-out holes 10d from perpendicularly hitting the substrate K to be treated. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
