| 摘要 |
The invention discloses an electro mechanical component, i.e. a nano electro-mechanical component, having a first, a second and a third portion, whereby the second portion is used to connect functionally the first and the third portion, comprising: a) the second portion comprises a bilayer comprising a first and a second layers made from two dissimilar at least semiconductive materials; b) the two materials having different lattice constants; and c) the first layer harbours tensile strain close to an interface connecting the first and the second layer and harbours compressive at its surface; and d) the second layer harbours compressive strain close to the interface connecting the first and the second layer and tensile strain at the relaxed section. |
