METHOD AND APPARATUS FOR DEPOSITING MATERIAL ON A SUBSTRATE
摘要
Material (4) is deposited on a substrate (8) by arranging the material in a container (2), and contacting the surface of the material (4) with a beam of electrons to so as to evaporate the material and transfer it to the substrate. A shield (7) opaque to electrons is arranged to cover a portion of the surface contacted by the beam of electrons. Relative movement occurs between the container (2) on one hand and the shield (7) and the beam of electrons on the other hand such that the portion of the surface previously contacted by the beam of electrons is no longer covered by the shield and is exposed to the substrate (8).
申请公布号
WO2004087986(A1)
申请公布日期
2004.10.14
申请号
WO2004GB01469
申请日期
2004.04.02
申请人
MICROEMISSIVE DISPLAYS LIMITED;BUCKLEY, ALASTAIR, ROBERT