摘要 |
<p><P>PROBLEM TO BE SOLVED: To produce a high efficiency solar cell element through a simple process. <P>SOLUTION: In the method for producing a solar cell element having a reverse conductivity impurity diffusion region and a surface electrode formed on major surface side of a one conductivity semiconductor substrate, a first impurity diffusion region is formed by performing first time heat treatment on one major surface side or both major surface sides of the semiconductor substrate substantially over the entire surface thereof, and then a second impurity diffusion region is formed by coating a region of the semiconductor substrate for forming the surface electrode with an impurity diffusion agent and then performing second time heat treatment. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |