| 摘要 |
PROBLEM TO BE SOLVED: To provide a Kelvin spiral contactor, being a Kelvin contact type contactor, for performing high-accuracy measurement such as resistance measurement, with its two contactors surely brought into contact with miniaturized spherical connection terminals without giving damage-causing contact marks to the connection terminals. SOLUTION: This Kelvin spiral contactor is equipped with two spiral contactors, on an insulation substrate, each having a spiral shape in top plan view and contacting with the spherical connection terminals. Of the spiral contactors, one spiral contactor 2 comprises a single piece with its end freed and is formed into a spiral shape so as to be narrowed from its root toward its end, and the other spiral contactor 3 is formed into a spiral shape so as to narrow from its root toward its end without interfering with spiral gaps in the spiral contactor 2. COPYRIGHT: (C)2004,JPO&NCIPI
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