| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component inspection device capable of suppressing surely a contact failure caused by deterioration of an anisotropic conductive rubber sheet, even when measuring many electronic components, to thereby heighten inspection reliability, and increasing an actual using area of the anisotropic conductive rubber sheet and elongating the service life thereof, to thereby reduce an inspection cost of the electronic component. SOLUTION: In this electronic component inspection device, the anisotropic conductive rubber sheet 4 is arranged on a measuring substrate 3 having a plurality of terminal parts provided on its upper surface, and the characteristic of the electronic component 6 is inspected by pressure contact of the electronic component 6 having an electrode 6 onto the anisotropic conductive rubber sheet 4 from the electrode 6 side. In the device, suction holes 3a as a plurality of suction holes are formed on the measuring substrate 3, and pressure contact of the electrode 6a of the electronic component 6 onto the anisotropic conductive rubber sheet 4 is performed in the state where the anisotropic conductive rubber sheet 4 is sucked and held on the measuring substrate 3 by suction from the suction holes 3a. COPYRIGHT: (C)2004,JPO&NCIPI
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