| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor chip in which variation in the height of electrodes is suppressed, a system and a process for producing such a semiconductor chip, a semiconductor device comprising that semiconductor chip, an electronic device and an electronic apparatus. <P>SOLUTION: The semiconductor chip is produced by a process comprising a step for chemically processing a semiconductor substrate in a chemical processing tub 10, and a step for cleaning the semiconductor substrate in a rinse tank. Chemical processing is carried out under such an environment as the chemical processing tub is shaded and the cleaning is carried out under such an environment as the rinse tank is not shaded. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
