| 发明名称 |
QUARTZ TOOL AND ITS MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a quartz tool prepared for a plasma processor and allowed to be permanently regenerated and a method for regenerating the quartz tool. <P>SOLUTION: The main face side surface of an inner peripheral edge side 1st area A1 of a focus ring 20 is formed higher than the surface of an outer peripheral edge side 2nd area A2 to provide a focus ring 20 having a step between the surfaces of the 1st area A1 and the 2nd area A2. In the case of regenerating the focus ring 20, a quartz material is dropped on the 1st area of the main surface of the wasted focus ring 20 to thick the 1st area, and a flat surface is formed on the 1st area and then mechanically polished so as to leave a step between the 1st area and the 2nd area to regenerate the focus ring 20. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
| 申请公布号 |
JP2004266127(A) |
申请公布日期 |
2004.09.24 |
| 申请号 |
JP20030055620 |
申请日期 |
2003.03.03 |
| 申请人 |
KAWASAKI MICROELECTRONICS KK |
发明人 |
SUZUKI KATSUNORI;NAKAMURA KENJI |
| 分类号 |
H01L21/3065;H01J37/32;H01L21/00;H01L21/683 |
主分类号 |
H01L21/3065 |
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