FIELD EMISSION TYPE COLD CATHODE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a field emission type cold cathode manufacturable in a self-matching way without forming a sacrifice layer or the like; and to provide its manufacturing method.

SOLUTION: An emitter electrode layer 2 is formed on an insulating substrate 1; an insulation sheet 3 having a hole 3a is disposed on the electrode layer 2; a metallic mesh 4 used as a gate electrode is disposed on the insulation sheet 3 as a mask member; and an electron emission layer 5 is formed in a self-matching way on the electrode layer 2 in the hole 3a through the mesh 4 by using a cathodic arc method or the like.

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