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发明名称
Vorrichtung zum Beschichten eines Substrates
摘要
申请公布号
DE4419167(B4)
申请公布日期
2004.09.02
申请号
DE19944419167
申请日期
1994.06.01
申请人
LEYBOLD OPTICS GMBH
发明人
BEISWENGER, SIEGFRIED
分类号
C03C17/00;C23C14/34;C23C14/35;H01J37/34;(IPC1-7):C23C14/35;C23C14/50;C23C14/14;H05H1/46;C03C17/245
主分类号
C03C17/00
代理机构
代理人
主权项
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