<p>A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.</p>
申请公布号
WO2004072705(A1)
申请公布日期
2004.08.26
申请号
WO2003US35890
申请日期
2003.11.12
申请人
NORTHROP GRUMMAN CORPORATION
发明人
STEWART, ROBERT, E.;CHERBETTCHIAN, AGOP, H.;FERSHT, SAMUEL;HALL, DAVID, B.