| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic teaching device and method for robot, which enables three-dimensional teaching a position to be a reference position with high precision. SOLUTION: The automatic teaching device is provided for a robot which conveys substrates to a semiconductor manufacturing apparatus using a robot arm. The device is provided with; a dummy substrate 20 having approximately the same shape as a substrate to be conveyed, wherein slits 21, 22, which are two-dimensionally separated in directions of X and Y, are disposed at predetermined positions; a sensor board 10 having an X-direction sensor 11 and a Y-direction sensor 12 for outputting position signals corresponding, respectively, to the X-direction slit 21 and the Y-direction slit 22 on the dummy substrate 20 and having a Z-direction sensor 13 for outputting a position signal in the Z direction which is perpendicular to the two-dimensional directions X and Y; and a signal processing unit 30 for outputting an absolute position signal based on the detection signals transmitted from the sensors for the respective directions X, Y and Z. COPYRIGHT: (C)2004,JPO&NCIPI
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