发明名称 Method for manufacturing electroluminescent element
摘要 The main object of the present invention is to provide a method for manufacturing an EL element capable of :preventing the state in which number of excessive layers are laminated on each light emitting part formed in a pattern at the time of forming the light emitting parts using the photolithography method; executing the peeling treatment easily and quickly in the excessive layer peeling process; and preventing generation of color mixture or pixel narrowing derived from the elution of the patterned light emitting part into the light emitting layer coating solution to be coated later, at the end part thereof, at the time of coating a light emitting layer coating solution. In order to achieve the above mentioned object, the present invention provides a method for manufacturing an electroluminescent element using a photolithography method comprising: a heterochromatic light emitting layer forming process of forming a heterochromatic light emitting layer on a substrate, provided with a light emitting part of at least one color and a protecting layer formed so that the light emitting part and the end part thereof are not bared, by coating a heterochromatic light emitting layer forming coating solution showing a color different from the light emitting part; a photoresist layer for the heterochromatic light emitting layer forming process of forming a photoresist layer for the heterochromatic light emitting layer by coating a photoresist on the heterochromatic light emitting layer; a photoresist layer for the heterochromatic light emitting layer patterning process of patterning the photoresist layer for the heterochromatic light emitting layer by pattern exposure and development so as only the photoresist layer for the heterochromatic light emitting layer of a part where the heterochromatic light emitting part is to be formed will remain; a heterochromatic light emitting part forming process of forming a patterned heterochromatic light emitting part having a photoresist layer for the heterochromatic light emitting layer on the surface by removing the heterochromatic light emitting layer bared by removing the photoresist layer for the heterochromatic light emitting layer; a protecting layer for the heterochromatic light emitting layer forming process of forming a protecting layer for the heterochromatic light emitting layer by coating a protecting layer forming coating solution so as to cover the heterochromatic light emitting part; and a protecting layer for the heterochromatic light emitting layer patterning process of exposing and developing the protecting layer for the heterochromatic light emitting layer so as not to bare the heterochromatic light emitting part and the end part thereof.
申请公布号 US2004152223(A1) 申请公布日期 2004.08.05
申请号 US20040763657 申请日期 2004.01.23
申请人 TACHIKAWA TOMOYUKI;ITO NORIHITO 发明人 TACHIKAWA TOMOYUKI;ITO NORIHITO
分类号 H05B33/10;H01L21/00;H01L27/32;H01L51/50;H01L51/52;H01L51/56;H05B33/12;H05B33/14;(IPC1-7):H01L21/00 主分类号 H05B33/10
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