发明名称 |
MICRODEVICE WITH MOVABLE MICROPLATFORM AND PROCESS FOR MAKING THEREOF |
摘要 |
A process for making a microdevice that includes the steps of providing a base member and selectively electroforming a support member for supporting a microplatform with respect to the base member. The process also includes the steps of selectively electroforming the microplatform and forming a flexible hinge member for hingedly connecting the microplatform to the support member and allowing relative movement of the microplatform with respect to the support member. This microdevice, when compared to prior art devices, can have improved mechanical strength, rigidity, low deformation, and high planarity.
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申请公布号 |
CA2417393(A1) |
申请公布日期 |
2004.07.27 |
申请号 |
CA20032417393 |
申请日期 |
2003.01.27 |
申请人 |
INSTITUT NATIONAL D'OPTIQUE |
发明人 |
JEROMINEK, HUBERT;TOPART, PATRICE |
分类号 |
B81B5/00;B81C1/00;G02B26/08;(IPC1-7):B81B5/00 |
主分类号 |
B81B5/00 |
代理机构 |
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代理人 |
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地址 |
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