摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an FEA which can realize uniform electron emission from an emitter and high-quality images and its manufacturing method. <P>SOLUTION: The present invention provides a device comprising a gate insulative layer formed on a cathode electrode, a gate electrode having a gate hole corresponding to a though hole of the gate insulative layer and an emitter formed on the gate electrode, wherein the emitter has a laminate structure consisting of a resistance substance layer comprising a resistance substance and an electron emission substance layer comprising a fine electron emission source formed on the resistance substance layer, and its manufacturing method. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |