| 摘要 |
PROBLEM TO BE SOLVED: To increase the production efficiency of a plasma display panel by evaluating the quality of a MgO film in a manufacturing process of the MgO film itself and then by managing manufacturing conditions of the MgO film based on evaluated values, allowing the stable MgO film to be incorporated in the plasma display panel, and thus to provide the plasma display panel with high reliability. SOLUTION: An optical characteristic measuring step 21 is interposed between a MgO film depositing step 19 and a panel sealing step 20. Optical characteristics of the MgO film 7 are measured, and the following depositing conditions of the MgO film 7, i.e. depositing processes of a substrate temperature, an oxygen partial pressure, a film forming rate, or the like are changed based on resulting values of the optical characteristics, such as the refractive index or the extinction coefficient, of the MgO film 7, and thus the deterioration in the quality of the film is corrected early. COPYRIGHT: (C)2004,JPO&NCIPI
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