METHOD FOR FORMING COPPER ELECTRIC WIRING ON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a technology for forming a fine circuit wiring having a superior embedding property of copper and a high electrical reliability on a substrate provided with a fine circuit pattern for an electronic circuit such as a silicon wafer, without producing defects such as a seam void in a channel, by electroless copper plating. SOLUTION: A method for forming the copper electric wiring on the substrate having the fine circuit pattern and a metal seed layer formed thereon for the electronic circuit, comprises immersing the substrate in a treatment liquid containing a polymer component, and subjecting it to electroless copper plating. COPYRIGHT: (C)2004,JPO&NCIPI