| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument for measuring three-dimensional shape that can measure a three-dimensional shape at a high speed with high accuracy, without producing dead angles. SOLUTION: This three-dimensional shape measuring instrument has light sources 1 and 11, projection optical systems 4 and 14 which respectively scan specific modulators 3 and 13, by projecting light rays emitted from the light sources 1 and 11 on the modulators 3 and 13 and project the images of the modulators 3 and 13 on an object S to be inspected, and an image forming optical system 5, which forms the pattern image projected upon the object S on an image pickup element 6. In addition, this measuring instrument uses a pattern projection method, by which the height information of the object S is found from the deformations of the pattern image detected by means of the image pickup element 6. Since this three-dimensional shape measuring instrument has the plurality of projection optical systems 4 and 14, that can project a pattern upon the object S from different direction with respect to the image forming optical system 5, the instrument can scan the pattern on the object S. COPYRIGHT: (C)2004,JPO&NCIPI
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