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发明名称
Verfahren und Vorrichtung zur Evaluierung der Qualität eines Halbleitersubstrats
摘要
申请公布号
DE10115264(B4)
申请公布日期
2004.07.01
申请号
DE20011015264
申请日期
2001.03.28
申请人
MITSUBISHI MATERIALS SILICON CORP., TOKIO/TOKYO
发明人
HASEGAWA, TAKESHI;ITO, TERUMI;SHIRAKI, HIROYUKI
分类号
G01B11/30;G01N21/64;(IPC1-7):G01N21/64;H01L21/66
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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