METHOD FOR FABRICATING THIN FILM TRANSISTOR OF LIQUID CRYSTAL DISPLAY INTEGRATED WITH DRIVING CIRCUIT

摘要

PURPOSE: A method for fabricating a thin film transistor of an LCD(Liquid Crystal Display) integrated with a driving circuit is provided to decrease a threshold voltage to reduce power consumption. CONSTITUTION: A buffer layer(105) is formed on a transparent insulating substrate(100). An amorphous silicon layer is formed on the buffer layer. The amorphous silicon layer crystallized to form a polysilicon layer. The polysilicon layer is patterned to form a semiconductor layer(110). The substrate on which the semiconductor layer is formed is loaded into a vacuum chamber and rapid thermal oxidation is carried out to form a thermal gate oxide layer. A gate insulating layer(130) is formed by deposition on the gate oxide layer. A metal is deposited on the substrate including the gate insulating layer. The rapid thermal oxidation is carried out at a temperature of 500 to 1000 degrees for 60 minutes.