| 发明名称 |
Method for recycling a substrate |
| 摘要 |
The present invention relates to a method for recycling a substrate that has a residue on its surface and a detachment profile resulting from an implantation process. The method includes removing the residue from the substrate to a level substantially equivalent to that of the detachment profile, thus obtaining a substantially uniform planar surface on the substrate, and then polishing the entire surface of the substrate to eliminate defects.
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| 申请公布号 |
US2004112866(A1) |
申请公布日期 |
2004.06.17 |
| 申请号 |
US20030728343 |
申请日期 |
2003.12.03 |
| 申请人 |
MALEVILLE CHRISTOPHE;LETERTRE FABRICE;MAURICE THIBAUT;MAZURE CARLOS;METRAL FREDERIC |
发明人 |
MALEVILLE CHRISTOPHE;LETERTRE FABRICE;MAURICE THIBAUT;MAZURE CARLOS;METRAL FREDERIC |
| 分类号 |
H01L21/302;B44C1/22;H01L21/00;H01L21/02;H01L21/304;H01L21/306;H01L21/762;(IPC1-7):B44C1/22 |
主分类号 |
H01L21/302 |
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