摘要 |
<P>PROBLEM TO BE SOLVED: To add characteristics such as an antireflection, polarization or wavelength selective filter to a micro structural body and to increase the performance of optical functions of the micro structural body by producing a periodical structure with a period shorter than the wavelength to the micro structural body or to each element of a micro structure array formed as integrated on a substrate. <P>SOLUTION: The micro structural body having optical functions is disposed on a substrate and has a periodical structure with a period smaller than the wavelength of light on the face where the light enters. <P>COPYRIGHT: (C)2004,JPO |