| 发明名称 |
Abrasive pad and process for the wet-chemical grinding of a substrate surface |
| 摘要 |
An abrasive pad is suitable for the wet-chemical grinding of a substrate surface. The novel abrasive pad has a polymer matrix with a defined water-solubility. The water-solubility is realized by the level of nonpolar and polar repeat units in the polymers.
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| 申请公布号 |
US2004116054(A1) |
申请公布日期 |
2004.06.17 |
| 申请号 |
US20030723630 |
申请日期 |
2003.11.26 |
| 申请人 |
GEYER STEFAN |
发明人 |
GEYER STEFAN |
| 分类号 |
B24B37/00;B24D3/00;B24D3/28;B24D3/34;B24D7/18;B24D13/14;C08K3/22;C08K3/34;C08L101/00;H01L21/304;(IPC1-7):B24B5/00;B24B29/00;B24D11/00 |
主分类号 |
B24B37/00 |
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