| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrapure water making apparatus for making ultrapure water extremely reduced in the concentration of metals. <P>SOLUTION: In a primary pure water making apparatus having a pretreatment system 1, a primary pure water making apparatus 10 and a secondary pure water making apparatus 20, the heat exchanger of the secondary pure water making apparatus 20 is transferred to be provided in the primary pure water making apparatus 10. The respective devices of the secondary pure water making apparatus 10 are made of a synthetic resin or lined with the synthetic resin. A part of the return ultrapure water from a use point 40 is returned to the primary pure water making apparatus 10 to be controlled in its temperature. <P>COPYRIGHT: (C)2004,JPO |
