发明名称 |
SEMICONDUCTOR PACKAGE INSPECTING APPARATUS AND INSPECTING METHOD USING THE SAME |
摘要 |
PURPOSE: A semiconductor package inspecting apparatus and an inspecting method using the same are provided to be capable of using a head assembly as an adaptor for reducing inspection cost and improving the efficiency of an inspection process. CONSTITUTION: A semiconductor package inspecting apparatus is provided with a pick and place tool for loading/unloading a semiconductor package, a head assembly(100), and a socket installed at the lower portion of the head assembly for connecting the semiconductor package to a tester. The head assembly includes a package guider(102) installed at the peripheral portion of the pick and place tool for aligning the semiconductor package, and a socket guider(104) for pressing a socket cover and carrying out a pre-alignment process.
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申请公布号 |
KR20040049219(A) |
申请公布日期 |
2004.06.11 |
申请号 |
KR20020077084 |
申请日期 |
2002.12.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
BANG, JEONG HO;CHAE, HYO GEUN;MIN, BYEONG JUN;SIM, HYEON SEOP |
分类号 |
G01R31/26;G01M99/00;G01N3/08;G01R1/04;G01R31/28;H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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