发明名称 SEMICONDUCTOR PACKAGE INSPECTING APPARATUS AND INSPECTING METHOD USING THE SAME
摘要 PURPOSE: A semiconductor package inspecting apparatus and an inspecting method using the same are provided to be capable of using a head assembly as an adaptor for reducing inspection cost and improving the efficiency of an inspection process. CONSTITUTION: A semiconductor package inspecting apparatus is provided with a pick and place tool for loading/unloading a semiconductor package, a head assembly(100), and a socket installed at the lower portion of the head assembly for connecting the semiconductor package to a tester. The head assembly includes a package guider(102) installed at the peripheral portion of the pick and place tool for aligning the semiconductor package, and a socket guider(104) for pressing a socket cover and carrying out a pre-alignment process.
申请公布号 KR20040049219(A) 申请公布日期 2004.06.11
申请号 KR20020077084 申请日期 2002.12.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BANG, JEONG HO;CHAE, HYO GEUN;MIN, BYEONG JUN;SIM, HYEON SEOP
分类号 G01R31/26;G01M99/00;G01N3/08;G01R1/04;G01R31/28;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/26
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