发明名称 |
An improved process for separation and recovery of perfluorocompound gases |
摘要 |
<p>Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.</p> |
申请公布号 |
EP0853970(B1) |
申请公布日期 |
2004.06.09 |
申请号 |
EP19980400082 |
申请日期 |
1998.01.16 |
申请人 |
L'AIR LIQUIDE, S.A. A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
LI, YAO-EN;PAGANESSI, JOSEPH E.;VASSALLO, DAVID;FLEMING, GREGORY K. |
分类号 |
B01D53/68;B01D53/00;B01D53/02;B01D53/22;B01D53/32;B01D63/02;B01D71/48;B01D71/50;B01D71/56;B01D71/62;B01D71/64;B01D71/68;C01B17/45;C07C17/38;C07C17/389;C07C19/08;(IPC1-7):B01D53/22 |
主分类号 |
B01D53/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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