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发明名称
Verfahren zum Schutz eines vakuumtechnisch bearbeiteten Substrates und Verwendung des Verfahrens
摘要
申请公布号
DE19935181(C5)
申请公布日期
2004.05.27
申请号
DE19991035181
申请日期
1999.07.27
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
MOOSHEIMER, ULRICH;LANGOWSKI, HORST-CHRISTIAN
分类号
B05D7/24;C23C14/12;C23C14/20;C23C14/56;(IPC1-7):C23C16/56;C23C14/58
主分类号
B05D7/24
代理机构
代理人
主权项
地址
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