| 摘要 |
PURPOSE: An apparatus for removing powders of an exhaust line of semiconductor equipment is provided to remove the powders from an inner wall of the exhaust line by injecting N2 gas into an inflow hole. CONSTITUTION: An apparatus for removing powders of an exhaust line of semiconductor equipment includes a top tube connector and a bottom tube connector. A plurality of bolt installation holes are formed on a top side of the top tube connector(2,2'). A tube connection hole(22) is formed on the top side of the top tube connector. The top tube connector includes a gradient hole(23,23') having an inner diameter of a tapering structure. A plurality of bolt fixing holes are formed on an outer circumference of a top side of the bottom tube connector(3'). An inflow hole(32) is formed on one sidewall and other sidewall of the bottom tube connector. A guide tube path(33) is formed in an inside diameter of the bottom tube connector corresponding to the gradient hole. A tube connection hole is formed on a bottom side of the bottom tube connector.
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