| 摘要 |
<p>The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen 14. Thereby, the column comprises a charged particle source 2 for providing a beam of charged particles 10; a lens system for guiding the beam of charged particles 10 from the source 2 onto the specimen 14; and a housing 40 which, during operation, is set on beam boost potential. <IMAGE></p> |
