| 发明名称 |
Photoresist compositions comprising blends of ionic and non-ionic photoacid generators |
| 摘要 |
The invention provides new photoresist compositions that contain a resin binder and a blend of non-ionic and ionic PAGS. Preferred resists of the invention preferably are imaged with 248 nm and/or 193 nm exposure wavelengths to provide highly resolved small dimension features.
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| 申请公布号 |
US6740467(B2) |
申请公布日期 |
2004.05.25 |
| 申请号 |
US20010860938 |
申请日期 |
2001.05.18 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
TREFONAS, III PETER |
| 分类号 |
G03F7/004;G03F7/11;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/004 |
| 代理机构 |
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