发明名称 |
Unitary removable shield assembly |
摘要 |
An apparatus for replacing consumables of a vacuum chamber. A unitary removable shield assembly is provided to quickly replace consumables such as a shield. The shield assembly can include an upper adapter assembly, at least one shield member, a cover ring and an insulator member. The shield assembly is designed so that the consumables can be replaced in one step and allows the chamber to continue with its maintenance cycle.
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申请公布号 |
US6730174(B2) |
申请公布日期 |
2004.05.04 |
申请号 |
US20020093252 |
申请日期 |
2002.03.06 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LIU ALAN B.;LAVITSKY ILYA;ROSENSTEIN MICHAEL |
分类号 |
C23C14/56;H01J37/32;(IPC1-7):C23C16/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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