| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical switch integrally formed with mirror elements on a semiconductor substrate formed with an integrated circuit including a driving control circuit etc., in a manner more easily than heretofore in the state of suppressing the degradation in the scale of integration and the degradation in yield. SOLUTION: The optical switch has a semiconductor substrate 101 consisting of silicon, has the integrated circuit composed of a plurality of elements on the semiconductor substrate 101 and has an interlayer insulating film 102 on the integrated circuit. The switch further has a wiring layer 104 and an interlayer insulating film 105 on the film 102. Also, a support member 120 is fixed on the semiconductor substrate 101 via the insulating films 102 and 105. The support member 120 supports the mirror structures. COPYRIGHT: (C)2004,JPO
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