| 发明名称 |
METHOD FOR FORMING ULTRA-HIGH STRENGTH ELASTIC DIAMOND LIKE CARBON STRUCTURE |
| 摘要 |
<p>Formation of ultra-high strength elastic diamond-like carbon comprises a chemical decomposition reaction of a hydrocarbon gas with a focussed ion beam. The irradiation amount of the focussed ion beam is controlled with an ion beam current of 0.1-10 pA.</p> |
| 申请公布号 |
EP1411144(A1) |
申请公布日期 |
2004.04.21 |
| 申请号 |
EP20020738851 |
申请日期 |
2002.06.28 |
| 申请人 |
NEC CORPORATION;SII NANO TECHNOLOGY INC. |
发明人 |
FUJITA, JUN-ICHI;ISHIDA, MASAHIKO;OCHIAI, YUKINORI;MATSUI, SHINJI;KAITO, TAKASHI |
| 分类号 |
C01B31/02;C23C16/26;B81C1/00;B82B1/00;B82B3/00;C01B31/06;C23C16/04;C23C16/27;C23C16/44;C23C16/455;C23C16/48;(IPC1-7):C23C16/27;B81C5/00 |
主分类号 |
C01B31/02 |
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