| 发明名称 |
Beam adjusting sample, beam adjusting method and beam adjusting device |
| 摘要 |
A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.
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| 申请公布号 |
US2004069952(A1) |
申请公布日期 |
2004.04.15 |
| 申请号 |
US20030679416 |
申请日期 |
2003.10.07 |
| 申请人 |
PIONEER CORPORATION |
发明人 |
KATSUMURA MASAHIRO;KOJIMA YOSHIAKI;WADA YASUMITSU;KITAHARA HIROAKI |
| 分类号 |
G01N23/225;G01N1/00;H01J37/20;H01J37/28;(IPC1-7):H01J37/244 |
主分类号 |
G01N23/225 |
| 代理机构 |
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代理人 |
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