| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy of determination of a defective object by adjusting the quantity of light projected from a projection member into a proper state by adapting it to a light quantity distribution of the quantity of reflected light or transmitted light from a powder-and-grain group to be actually inspected. SOLUTION: This device is equipped with a light receiving means 5 for receiving light from an existence scheduled spot of the powder-and-grain group, the projection member 8 arranged on a backside spot, for projecting light toward the light receiving means 5, a determination means for determining existence of the defective object when a light quantity value of the received light quantity deviates from a proper light quantity range to detection light from a normal object, and determining a frequency distribution to each light quantity value relative to a plurality of received light quantity data, and a light quantity adjusting means for changing and adjusting the quantity of light projected from the projection member toward the light receiving means so that the light quantity value having the highest frequency in the frequency distribution is positioned on a proper position in the proper light quantity range. COPYRIGHT: (C)2004,JPO
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