OPTICAL SWITCH DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To easily manufacture an optical switch device finer than the conventional device while suppressing reduction in an integration degree or reduction in yield and to control a mirror with a high precision. SOLUTION: The optical switch device is constituted of a mirror substrate 130 which is supported on a specific plane on a semiconductor substrate 101 by supports 120 having conductibility and is provided with opening areas, mirrors 131 turnably provided in opening areas of the mirror substrate 130, control electrode parts 140 and a control circuit 150 for making the mirrors 131 turn, sensor electrode parts 151 for detecting rotation angles of mirrors 131, and sensor circuits 152 for detecting turning angles of mirrors 131 on the basis of signals of sensor electrode parts 151. These components are integrated on the semiconductor substrate 101 made of silicon. COPYRIGHT: (C)2004,JPO