发明名称 Heating device of the light irradiation type
摘要 A heating device of the light irradiation type in which uniform illuminance can be obtained without placing a single end lamp in the middle of the light source part is achieved providing a light source part in which circular lamps are arranged concentrically to one another with a mirror in the center of the circular lamps. The mirror is convex toward the workpiece and reflects the light emitted from the innermost circular lamp located closest to the center area so that, without placing a single end lamp in the middle area, the reduction of illuminance in the middle area of the irradiated surface is reduced. Furthermore, the reflector can be made conical, and in this way, the light from the lamps can be emitted with high efficiency onto the workpiece surface.
申请公布号 US6718127(B2) 申请公布日期 2004.04.06
申请号 US20020222853 申请日期 2002.08.19
申请人 USHIODENKI KABUSHIKI KAISHA 发明人 SUZUKI SHINJI
分类号 H01L21/22;C30B25/10;C30B31/14;H01L21/00;H01L21/205;H01L21/26;(IPC1-7):F26B19/00 主分类号 H01L21/22
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