| 摘要 |
PROBLEM TO BE SOLVED: To easily realize both bright field illumination and dark field illumination at a low cost. SOLUTION: The inspection device is provided with a light source, an annular filter disposed at the conjugate point of incident light from the light source, and a beam splitter for changing the direction of the incident light that passed through the annular filter. The incident light changed in direction by the beam splitter is incident on a specimen and then reflected as reflected light by the specimen. The reflected light passes through the beam splitter, and the incident light is made obliquely incident on the specimen by the annular filter. Only diffracted light of high order out of the reflected light thereby enters an optical path of the incident light. The inspection device is further provided with an aperture disposed at the conjugate point of the reflected light that passed through the beam splitter, and diffracted light of low order of the reflected light reflected on the circumferentially opposite side of the incident light may be intercepted by the aperture. Further, the dimensions of the annular filter and aperture may be variable. COPYRIGHT: (C)2004,JPO
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