STOCKER, AIR CONDITIONING CONTROLLER, AIR CONDITIONING CONTROL METHOD, AND AIR CONDITIONING CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To efficiently adjust positive pressure in a stocker provided in a clean room. SOLUTION: An opening rate control part 18 adjusts positive pressure in the stocker 1 automatically by controlling opening rates of shutters 8a, 9a, 8b, 9b of prefilters 6a, 7a, 6b, 7b and a shutter 12 below grating 11 based on wind velocity data measured by anemometers 13, 14 and differential pressure data measured by differential pressure gages 15 to 17, respectively. COPYRIGHT: (C)2004,JPO