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发明名称
摘要
申请公布号	JP2004507880(A)	申请公布日期	2004.03.11
申请号	JP20010577585	申请日期	2001.04.17
申请人		发明人
分类号	B81B3/00;B81C1/00;C23C16/24;C23C16/511;H01L21/306;H01M8/02;(IPC1-7):H01L21/306	主分类号	B81B3/00
代理机构		代理人
主权项
地址

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