| 摘要 |
PROBLEM TO BE SOLVED: To prevent a drop of a sample holder in transferring it, and to easily attach and detach the sample holder to/from a sample changing rod. SOLUTION: According to this application, in order to accomplish the purpose, a holding member using spring force like a banana chip is attached to the sample changing rod, and inserted into a hole of the sample holder to elastically hold it. The spring force is set to a level allowing the sample holder to be detached from the holding member (sample changing rod) when attached to a sample stage. By virtue of this structure, the drop of the sample holder in transferring it is effectively prevented, and the sample holder can easily be attached and detached to/from the sample changing rod. COPYRIGHT: (C)2004,JPO
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