发明名称 Image processing method and unit, detecting method and unit, and exposure method and apparatus
摘要 An image of a plurality of areas of which two adjacent areas have different image characteristics from each other are acquired (steps 111 through 114); the image is analyzed in light of the difference between image characteristics, for example textures, of the two adjacent areas (step 115), and information about the boundary between the two adjacent areas is obtained (step 116). And by detecting shape information and/or position information of a given image area based on the obtained boundary information, shape information, position information, optical characteristic information, etc., of the object are detected (step 117). Thus, shape information, position information, optical characteristic information, etc., of the object are accurately detected.
申请公布号 US2004042648(A1) 申请公布日期 2004.03.04
申请号 US20030447230 申请日期 2003.05.29
申请人 NIKON CORPORATION 发明人 YOSHIDDA KOUJI;YOSHIDA MAKIKO;MIMURA MASAFUMI;SUGIHARA TAROU
分类号 G06T5/00;G06T7/40;(IPC1-7):G06K9/00 主分类号 G06T5/00
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