| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrahigh temperature type load meter capable of easily detecting a load at very high temperature and preventing corrosion, and its manufacturing method. SOLUTION: This ultrahigh temperature type load meter is provided with a pressure receiving part 13 receiving a load from outside, a sapphire layer 22 provided with a silicon semiconductor strain gage 21, and a bonding layer 15 formed by soldering the sapphire layer 22 and the pressure receiving part 13 with a jointing material comprising gold or silver, copper, and titanium. COPYRIGHT: (C)2004,JPO
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