| 摘要 |
PROBLEM TO BE SOLVED: To quickly analyze a composition of a solid sample or a liquid sample at high precision. SOLUTION: In this method for conducting spectroscopy for excited light from a plasma generated by irradiating the sample with a laser pulse beam, an analyzed position of the sample is irradiated with the first laser pulse beam, the analyzed position is irradiated with the second laser pulse beam and the beam hereafter with a time interval from the irradiation, and power densities in the analyzed position are made different between the first laser pulse beam, and the second laser pulse beam and the beam hereafter. COPYRIGHT: (C)2004,JPO
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