| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that it is difficult to discriminate whether an average value of a gradation value representing the brightness of a defect, represents the defect of a front surface 1a or the defect of a rear surface 1b on the basis of a threshold value, as the average value of the gradation value representing the brightness of the defect of the rear surface 1b is close to an average value of a gradation value representing the brightness of the defect of the front surface 1a in accordance with the increase in size of the defect of the rear surface 1b. <P>SOLUTION: The outline of the defect is extracted, and the contrast is given to the outline of the defect to discriminate the defect of the front surface 1a and that of the rear surface 1b of a searched object 1 with high accuracy. Whereby the searching adapted to the actual manufacturing line such that only the defect of the front surface 1a is regarded as no-good, only the defect of the rear surface is regarded as no-good, and each of the defects of the front surface 1a and the rear surface 1b is totalized, can be performed. <P>COPYRIGHT: (C)2004,JPO |
