ACTUATOR COOLING SYSTEM OF SEMICONDUCTOR DRY ETCHING EQUIPMENT

摘要

PURPOSE: An actuator cooling system of semiconductor dry etching equipment is provided to be capable of easily cooling an actuator by improving the structure of the actuator cooling system. CONSTITUTION: An actuator cooling system of semiconductor dry etching equipment is provided with an actuator(62) for moving a lift pin or a cathode up and down, and a cooling gas line(77) connected through the actuator for supplying cooling gas. Preferably, the actuator includes a piston rod(60) connected with the lift pin or cathode, and a cylinder(50) for moving the piston rod up and down. Preferably, the cooling gas line is inserted into the piston rod. Preferably, the inserted portion of the cooling gas line is made of SUS material.